Spin/Rinse/Dryer Instructions

 Things to turn on in the Service Corridor:

1. Turn on compressed Nitrogen

Procedure:

At the machine:

1. Turn on Nitrogen Turret on the wall, set float to 50
2. Turn on DI water line
3. Turn on power switch
4. Set desired Rinse and Dry times
5. Open machine door, remove plastic wafer holder
6. Load wafers into wafer holder evenly spaced
7. Load wafer holder into the machine
8. Close door
9. Press start button
10. Wait for machine to run
11. Open  door
12. Remove wafer holder and remove wafers from the holder
13. Replace wafer holder in machine and close the door
14. Turn off DI Water and Gas when down with machine

procedure prepared by Francisco Tejada, Spring 2003; modified by La Vida Cooper, Spring 2003.