Standard Operating Procedure

Introduction:

Dektak IIA is a surface profile measuring system that can be used to measure vertical features ranging from 20nm to 65,000nm. The horizontal scanning length is ranging from 50 microns to 30mm. It has a 90X video camera to assist you in positioning your sample relative to the stylus. It is equipped with a submicron diamond tip stylus, a very expensive and delicate part of the instrument so be very careful with it.

Procedure:

1. Turn on the POWER.
2. Carefully place the sample on the stage to avoid bumping the stylus.
3. Press the PROG button to set up the program. Use the DIRECTION arrows to select and modify the parameters of your scanning program. Below is a typical program menu:

               * Program: don’t need to modify

               * ID number: type any number then press ENTER.

               * Scan Length: typing the desired length and its unit then press ENTER.

               * Speed: There are 3 different speeds, but MEDIUM is recommended. SLOW speed gives noise and HIGH speed causes stylus to bounce and might damage the submicron tip stylus.

               * Range: select AUTO then press ENTER.

               * Profile: 3 profiles to choose from, but it doesn’t matter which one is selected.

               * Auto leveling: don’t need to modify

               * R cursor: Preset

               * M cursor Preset

      4. Making the measurement: The measuring features should be seen on the monitor, if not then press the VIDEO button until the features are on the screen. (It can also be that the video camera is out of focus because of the thickness of the current substrate or adjusted by previous users.)

       5. Press the STYLUS button to see the position of the stylus relative to the substrate. If the substrate needs to be repositioned, press STYLUS button again to bring up the stylus and then adjust the position of the substrate.

       6. Press SCAN button to start scanning.

       7. As the stylus is dragging from front to back, the trace is drawing on the screen. The vertical or horizontal distance of the two points on the final plot can be identified by placing the R and M cursor at those two points. R and M cursor can be moved using DIRECTION arrows.

       8. A specific area of the plot can be magnified by redefine the PLOT BOUNDRY using the direction arrows, then hit REPLOT button.

       9. Turn on the Printer.

      10. Press PRINT if a printout is needed.

      11. Remove the sample.

      12. Turn off the power.

      13. Report to the lab manager if there is any problem or concerns.  

 SOP prepared by Mr. Huy Vo, March 2004.