Photo Mask Aligner Instructions

In the Service Corridor turn on the nitrogen; at machine turn on the nitrogen turret, vacuum turret, power button at machine controls, power switch at light source controls, and turn on power source for microscope lights

To insert the mask remove the 4 screws in metal the holding frame and remove metal frame. Now insert desired mask and replace metal frame and screws.  

Wafer loading video (Long; 3Mb video)

 Press and hold the Start rocker switch at light source controls, when you hear a squealing sound release the switch.  Lift the mask platform and place the wafer on the chuck.. Turn on the sub vacuum switch and lower the mask platform.  Use your eyes to roughly align mask and wafer using the translation knobs.  Now press the cycle button, use the microscope to do a final alignment of the mask and wafer and press the cycle button.

Check the timer for appropriate the exposure time. Yell out “EXPOSING” so that others in lab know not to look at the UV light source, press the Expose button and look away. Wait until you hear a click at the end of the exposure and press the Cycle button. Lift the mask platform, turn OFF substrate vacuum and remove the wafer. When you are done with the machine turn off all power switches, turn off nitrogen turret and vacuum turret.

procedure prepared by Francisco Tejada, Spring 2003; modified by La Vida Cooper, Spring 2003.