Homework and pre-laboratory assignments
: In a laboratory course, you have ample opportunities for collaboration. Developing the ability to work within a group is certainly one of the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate.Laboratory safety and environment awareness: When working in the lab you must follow all proper procedures to avoid injuring yourself or anyone else that works with you. When disposing chemical waste it is important that you follow proper laboratory procedures to assure that our environment stays clean and free from contaminants. Please read the Laboratory Safety handout, and revisit it periodically to refresh yourself and especially when in doubt about a particular process or procedure. After reading the Laboratory Safety handout please download, print and sign the pledge to be a good lab citizen and follow all safety rules and regulations. The signed pledge must be handed in with the first homework assignment.
| Week | Laboratory session |
| 1 | No laboratory session |
| 2 |
Lab #1a Laboratory orientation and instrumentation |
| 3 |
Lab #1b CAD tools and mask design Lab1bFiles (zip) (Account passwords for computer lab will be given to students by T.As. during lab sections) |
| 4 | Lab #2_Photolithography |
| 5 | Lab #3_SU8 Lithography |
| 6 | Lab #4_Soft Lithography |
| 7 | Lab #5 |
| 8 | Lab #6 |
| 9 | Lab #7 |
| 10 | Lab #8 |
| 11 | Lab #10 |
| 12 | Testing |
| 13 |
|
CAD Tools Computer aided design is playing an important role in the development of the microelectronics industry. Sophisticated programs are necessary to do mask layout, to simulate the fabrication process, as well as the devices and circuits. At the system level CAD tools are also employed in high level synthesis of complex systems such as modern day microprocessors and graphics chips. For more information see our CAD tools page. Frequently Asked Questions How do I ... , where can I find ... , what is ... , ? Reading References 1. Introduction to Microelectronic Fabrication, 2nd Edition, Richard C. Jaeger, Volume V; Modular Series on Solid State Devices , G. W. Neudeck and R.F. Pierret eds., Prentice Hall, 2002. 2. Fundamentals of Microfabrication : The Science of Miniaturization, Marc J. Madou, CRC Press, 2nd edition, 2002. 3. Fundamentals of Semiconductor Fabrication, Gary S. May, Simon M. Sze, Wiley Publishers, April 2003. 4. Silicon as Mechanical Material , K. E. Petersen, Proceedings of IEEE, vol. 70, no. 5, pp. 420-457, May 1982 (pdf). 5. The 1.7 Kilogram Microchip: Energy and Material Use in The Production of Semiconductor Devices, E. D. Williams, R.U. Ayres, and M. Heller (pdf). Supplementary information (pdf) and Nature editorial on this article (pdf). Related JHU Links Whitaker Lithography and Fabrication Lab 520/530.773 Advanced Topics in Fabrication and Microengineering 520/530.487 Introduction to Microelectromechanical Systems (MEMS) 540.440/540.640 Chemical Engineering for Micro and Nano Technology Bibliography A collection of articles from previous years
Microfabrication, MEMS and Soft-Lithography Links Equipment and Supplies Links
Acknowledgements This course is supported by a Whitaker Foundation Development grant and by Kenan grants from the Whiting School of Engineering. Page maintained by A.G. Andreou, andreou at jhu.edu , Last update: Wednesday, September 03, 2008 |