520/530/580.495 Microfabrication Lab

520.773 Advanced Topics in Fabrication and Microengineering

Final Project, Report and Class Presentation

PART I: Final Project and Report

Microfabrication; Energy, Materials and Environment

The purpose of the final project and report is  (i) to reinforce your understanding of  how your microfabricated device was constructed, and (ii) to investigate the broader impacts of microfabrication processes (economic and environmental).

You are allowed to discuss the paper with your fellow students BUT you must do the calculations and report on your own! Keep a tally and report the amount of time that you have worked on this final project and report.

Reading:

NATURE editorial, paper and support material for:

The 1.7 Kilogram Microchip: Energy and Material Use in The Production of Semiconductor Devices, E. D. Williams, R.U. Ayres, and M. Heller, Environmental Science and Technology, October 24th, 2002.

Question 1:  Do a critical review/summary  of the paper (1 page)

Question 2: Based on the information given in the paper and references therein AND your laboratory notes

i) Summarize your project work in a process flow diagram.

ii) Construct a diagram for your class project (similar to that shown in Figure 1 of the paper).

iii) Calculate the material amount for fabricating your chip (see Figure 2 of the paper).

iv) Calculate the energy costs for production and use for your chip (see Figure 3 of the paper).

The report, including figures, should be no longer than 5 single space typeset pages long. Use an excel spreadsheet to do the calculations. Submit a hardcopy printed  AND electronic versions of your report as well supporting data (excel spreadsheet) on a diskette.

Written project report due: 5.00 p.m. 12/6/2004: ECE office,  Barton Hall 105.

PART II  Class Presentation

In this course we are learning the basis of fabrication technologies within a context of a laboratory that has limited scope and facilities. We have a contact mask aligner, a photoresist spinner, an oxidation furnace, and a thermal evaporator as well as basic chemical setups for wet etching. However we need to broaden our horizons about what is possible to do and what others are doing. The following six papers discuss  both processing improvements in fabrication  and integration  as well as different devices with applications in biology/medicine.

  1. Microscope Projection Photolithography for Rapid Prototyping of Masters with Micron-Scale Features for Use in Soft Lithography (Langmuir, 2001, v17, p6005)
  2. Components for integratedpoly(dimentylsiloxane) microfluidic systems, (Electrophoresis, vol. 23, pp. 3461–3473, Oct.2002).
  3. Separation of Long DNA Molecules in a Microfabricated Entropic Trap Array (Science, 2000, v288, p1026)
  4. Chemical Amplification: Continuous-Flow PCR on a Chip (Science, 1998, v280, p1046)
  5.  Microfluidic large-scale integration, (Science, vol. 298, pp. 580–584, Oct. 2002).
  6. Fabrication of a Cylindrical Display by Patterned Self-Assembly (Science, 2002, v296, p323)

Read ONE of the above papers and prepare a presentation for the class. In preparing your presentation keep in mind the resources of the lab at Hopkins and discuss the possibility of doing the project or work in our lab. Work in groups of 2 or 3 (teams that you had in the lab sections). You will have 5 minutes for your presentation with an additional 2 minutes for questions. Your presentation should be prepared using a presentation software package (Powerpoint, Freelance e.t.c) and converted to a PDF file. Bring your presentation on  a floppy or a memory stick so that we can do an electronic presentation in the class. Your presentation should contain no more than 8 slides WITHOUT color background (you can use color figures but do not use fancy background schemes).

The presentation should include:

  1. Names and title of  the  project (1 slide)
  2. Introduction and literature survey (1 slide)
  3. Fabrication (1 or 2 slides)
  4. Characterization and Testing (1 slide)
  5. Conclusions (1 slide)
  6. Extra slides with results from testing your device that you fabricated in the lab (1 or 2 slides).

Please hand in: i) an electronic AND hardcopy version of your presentation

Due: Presentation and submission of work in class on December 2th and 3th in a place to be decided.