520.494/580.495 Microfabrication Laboratory
Homework Assignment
Thermal Oxidation
Reading:
Chapter 3 of Jaeger
Show And Tell: Print and assemble the "Chris Pister" silicon polyhedron (pdf)
Questions:
Note: When problem number in the 2nd edition of the book differs from the 1st edition, the corresponding 2nd edition number is shown in parenthesis.
Q1-5: Problems 3.1, 3.2, 3.3, 3.4(3.14), 3.5(3.11)
Q6: Problem 3.6(3.19) with changes indicated below:
Use a spreadsheet program such as Microsoft Excel for the calculation.
Set up a table like the one below.
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|
Dry |
|
Wet |
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|
Temp |
Linear |
Parabolic |
Linear |
Parabolic |
|
950 |
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1000 |
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1050 |
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1100 |
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1150 |
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1200 |
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Q7-8: Problems 3.7(3.13), 3.8(3.18)
Q9: Problem 3.9(3.20) with changes indicated below:
Use a spreadsheet program such as Microsoft Excel for the calculation.
Set
up a table like the one below.
|
Oxide
thickness |
0.5 |
|||
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|
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Dry |
|
Wet |
|
|
Temp |
<100> |
<111> |
<100> |
<111> |
|
950 |
|
|
|
|
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1000 |
|
|
|
|
|
1050 |
|
|
|
|
|
1100 |
|
|
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|
1150 |
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|
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1200 |
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