520.494/580.495 Microfabrication Laboratory
Homework Assignment
Lithography
Reading: Chapter 2 of Jaeger
Questions:
Note: When problem number in the 2nd edition of the book differs from the 1st edition, the corresponding 2nd edition number is shown in parenthesis.
Q1-4: Problems 2.1, 2.2, 2.3, 2.4