520.494/580.495 Microfabrication Laboratory

Homework Assignment

Lithography

Reading: Chapter 2 of Jaeger (1st or 2nd edition).

Questions:

Note: When problem number  in the 2nd edition of the book differs from the 1st edition, the corresponding 2nd edition number is shown in parenthesis.

Q1-4: Problems 2.1, 2.2, 2.3, 2.4