520.494/580.495 Microfabrication Laboratory

Final Project and Report

Microfabrication; Energy, Materials and Environment

The purpose of the final report is  (i) to reinforce your understanding of  how your microfabricated device was constructed, and (ii) to investigate the broader impacts of microfabrication processes (economic and environmental).

You are allowed to discuss the paper with your fellow students BUT you must do the calculations and report on your own! Keep a tally and report the amount of time that you have worked on this final project.

Reading:

NATURE editorial, paper and support material for:

The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices, Environmental Science and Technology, October 24th, 2002 by E R I C   D .   W I L L I A M S ,    R O B E R T   U .   A Y R E S ,   A N D  M I R I A    M    H E L L E R 

Question 1:  Do a critical review/summary  of the paper (1 page)

Question 2: Based on the information given in the paper and references therein AND your laboratory notes

i) Summarize your project work in a process flow diagram.

ii) Construct a diagram for your class project (similar to that shown in Figure 1 of the paper).

iii) Calculate the material amount for fabricating your chip (see Figure 2 of the paper).

iv) Calculate the energy costs for production and use for your chip (see Figure 3 of the paper).

The report, including figures, should be no longer than 4 single space typeset pages long.