520.494/580.495 Microfabrication Laboratory

Homework Assignment

Film Deposition

Reading: Chapter 6, Sections 6.1, 6.2, 6.3 of Jaeger (1st or 2nd edition)

Questions:

Note: When problem number  in the 2nd edition of the book differs from the 1st edition, the corresponding 2nd edition number is shown in parenthesis.

Q1: Problem 6.1

Q2: Repeat problem 6.1, but this time the wafer is kept in a nitrogen-purged cabinet in which the oxygen contents is less than 0.1% of the total gas content.

Q3-Q8: Problems 6.2(6.3), 6.3(6.4), 6.4(6.6), 6.5(6.7), 6.9(6.13), 6.10(6.14a)