520.494/580.495 Microfabrication Laboratory
Homework Assignment
Film Deposition
Reading:
Chapter 6, Sections 6.1, 6.2, 6.3 of Jaeger
Questions:
Note: When problem number in the 2nd edition of the book differs from the 1st edition, the corresponding 2nd edition number is shown in parenthesis.
Q1: Problem 6.1
Q2: Repeat problem 6.1, but this time the wafer is kept in a nitrogen-purged cabinet in which the oxygen contents is less than 0.1% of the total gas content.