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Professor Andreas G. Andreou, Latrobe 229, 410-516-8361, Jennifer Blain, (Teaching Assistant) Latrobe 226, 410-516-0258, blain@jhu.edu Francisco Tejada (Laboratory Assistant) Latrobe 226, 410-516-0258 ft1@jhu.edu
Homework and pre
-laboratory assignments: In a laboratory course, you have ample opportunities for collaboration. Developing the ability to work well in a group is certainly one of the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate.Laboratory safety and environment awareness: When working in the lab you must follow all proper procedures to avoid injuring yourself or anyone else that works with you. When disposing chemical waste it is important that you follow proper laboratory procedures to assure that our environment stays clean and free from contaminants. Please read the Laboratory Safety handout
, and revisit it periodically to refresh yourself and especially when in doubt about a particular process or procedure. After reading the Laboratory Safety handout please download, print and sign the pledge to be a good lab citizen and follow all safety rules and regulations. The signed pledge must be handed in with the first homework assignment.Textbook
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Introduction to Microelectronic Fabrication Volume V; Modular Series on Solid State Devices G. W. Neudeck and R.F. Pierret eds. Addison-Wesley, 1993. ISBN 0-201-14695-9 |
Schedule and Syllabus
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Week |
Lecture topics |
Laboratory session |
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1 |
Organizational meeting |
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2 |
Introduction DNA microchips and microfabrication |
Tour of laboratory facilities and review of safety procedures on site.
Laboratory microscope and profilometer. |
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3 |
Photolithography (I): Basics (Chapter 2)
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CAD tools and mask design |
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4 |
Thermal oxidation of silicon (Chapter 3) |
Wafer oxidation. |
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5 |
Film deposition (Chapter 6.1, 6.2) |
Aluminum deposition. |
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6 |
Photolithography (II): Positive photoresists |
Photolithography; metal pattern definition and annealing. |
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7 |
Wet Etching |
SU8 photoresist deposition and curing; electrode areas/cuts definition and opening. |
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8 |
Plating
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Immersion gold plating. |
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9 |
Packaging and testing (Chapter 8) |
Lab #7 (Instructions to be given in the lab) Wafer dicing, packaging and bonding. |
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10 |
CMOS (Chapter 9) and MEMS design MOSIS and Cronus and MEMS Exchange foundries Handout #9 |
Lab #8 (Instructions to be given in the lab) Device testing and characterization Individual project work. |
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11 |
Soft-lithography ; microfabrication for medicine and biology - a review-Handout #10 |
Thanksgiving
No laboratory sessions. |
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12 |
Project presentation and discussion (I) |
Lab #9
Individual project work. |
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13 |
Project presentation and discussion (II) |
Lab #10 Optional individual project work. |
CAD Tools
The CAD program LEDIT will be used for mask design. Homework Assignments and Solutions
| Homework #1: Due 9/27/2000 | Solutions to Homework #1 |
| Homework # 2: Due 10/4/2000 | Solutions to Homework #2 |
| Homework # 3: Due 10/11/1999 | Solutions to Homework #3 |
| Homework # 4: Due 10/18/1999 | Solutions to Homework #4 |
| Midterm Exam
Part (I): Due 9.00 a.m. 11/8/2000 |
Solutions to Midterm Part (I) |
| Homework # 5: Due 11/15/2000 | Solutions to Homework #5 |
| Homework # 6: Due 11/22/2000 | Solutions to Homework #6 |
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Project presentation: 11/29/2000 and 12/6/2000 |
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Written project report due: 5.00 p.m. 12/7/2000 |
Absolutely no extensions! |
Reading References:
1. Introduction to Microelectronic Fabrication , Richard C. Jaeger, Volume V; Modular Series on Solid State Devices , G. W. Neudeck and R.F. Pierret eds., Addison-Wesley, 1993.
2. Silicon as Mechanical Material , K. E. Petersen, Proceedings of IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
3. Soft Lithography, Younan Xia and George M. Whitesides, Angewandte Chemie, International Edition, 37, 550-575, 1998.
4. DNA Microarrays: A practical approach, M. Shena editor, The Practical Approach Series, Oxford University Press, Oxford 1999 (reprinted 2000).
5. Nanogen Corporation, Product and technology section, http://www.nanogen.com/tech.htm
6. Preparation and hybridization analysis of DNA/RNA from E. coli on microfabricated bioelectronic chips, J. Cheng, et.al. Nature Biotechnology, vol. 16, pp. 541-546, June 1998.
Frequently Asked Questions about procedures and equipment in the lab.
How do I …. ? FAQ
Links to Equipment and Supplies
Printed Circuit Board manufacturing and design software
MICROCHEM Corp (SU-8 photoresist supplier)
SOTEC Microsystems (SU-8 photoresist supplier)
Technic Inc (Plating solutions)
Transene (Etching, Plating, Cleaning solutions)
Small Parts (Tubing, solder and alloys)
Web Pages from Previous Years
1994 Final Project Report by Tim Edwards.
1998 Microfabrication Laboratory WWW page.
1999 Microfabrication Laboratory WWW page.
Links to Microfabrication, Soft Lithography and MEMS
MEMS clearing house at ISI (MOSIS)
University of Michigan microfabrication laboratory
U.C. Davis microfabrication laboratory
Caltech micromachining laboratory
Center for Applied Microtechnology at University of Washington
Acknowledgements
This course is supported by a Whitaker Foundation Development grant and by Kenan grants from the Whiting School of Engineering.
To see a layout of our new facility (to be) in the Biomedical Engineering Institute at Homewood campus click
here!
