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Professor Andreas G. Andreou, Latrobe 229, 410-516-8361, Jennifer Blain, (Teaching Assistant) Latrobe 226, 410-516-0258, blain@jhu.edu Eugenio Culurciello (Laboratory Assistant) Latrobe 226, 410-516-0258 euge@jhu.
Homework and pre
-laboratory assignments: In a laboratory course, you have ample opportunities for collaboration. Developing the ability to work well in a group setting is certainly one the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate.Laboratory safety and environment awareness: When working in the lab you must follow all proper procedures to avoid injuring yourself or anyone else that works with you. When disposing chemical waste it is important that you follow proper laboratory procedures to assure that our environment stays clean and free from contaminants. Please read the Laboratory Safety handout
, and revisit it periodically to refresh yourself and especially when in doubt about a particular process or procedure. After reading the Laboratory Safety handout please download, print and sign the pledge to be a good lab citizen and follow all safety rules and regulations. The signed pledge must be handed in with the first homework assignment.Textbook
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Introduction to Microelectronic Fabrication Volume V; Modular Series on Solid State Devices G. W. Neudeck and R.F. Pierret eds. Addison-Wesley, 1993. ISBN 0-201-14695-9 |
Schedule and Syllabus
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Week |
Lecture topics |
Laboratory session |
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1 |
Organizational meeting Introduction to Microfabrication (Chapter 1) |
Tour of laboratory facilities and review safety procedures on site. |
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2 |
Course overview Project process flowchart |
Laboratory microscope and profilometer. |
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3 |
Thermal oxidation of silicon (Chapter 3) |
Wafer oxidation. |
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4 |
Film deposition (Chapter 6) |
Aluminum deposition. |
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5 |
Photolithography (Chapter 2) |
Lithography: metal pattern formation and annealing. |
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6 |
Photolithography (Fine points) |
Polysiloxane film deposition and curing. |
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7 |
Etching |
Lithography: electrode areas/cuts definition and opening. |
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8 |
Packaging and testing (Chapter 8) |
Wafer dicing, packaging and bonding. Device testing and characterization (I) |
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9 |
Part (I) of midterm examination due Part (II) of midterm examination discussion |
Device testing and characterization (II) Individual project work. |
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10 |
CMOS (Chapter 9) and CMOS compatible MEMS design. |
CAD tools and mask design (in the Computer Engineering Laboratories, Latrobe Hall, second floor). |
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11 |
Soft-lithography ; microfabrication for medicine and biology - a review-
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Thanksgiving
No laboratory sessions. |
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12 |
Project presentation and discussion (I) |
Lab #10 Individual project work. |
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13 |
Project presentation and discussion (II) |
Lab #11 Optional individual project work. |
CAD Tools
The layout editing program LEDIT will be used for mask design. Homework Assignments and Solutions
| Homework #1: Due 9/29/1999 | Solutions to Homework #1 |
| Homework # 2: Due 10/5/1999 | Solutions to Homework #2 |
| Homework # 3: Due 10/12/1999 | Solutions to Homework #3 |
| Homework # 4: Due 10/19/1999 | Solutions to Homework #4 |
| Midterm examination: Part (I) due 11/10/1999 | Solutions to Midterm Part (I) |
| Homework # 5: Due 11/17/1999 | Solutions to Homework #5 |
| Homework # 6: Due 11/24/1999 | Solutions to Homework #6 |
| Project presentation -Midterm Part (II)- 12/1/1999 and 12/8/1999 | |
| Final project report: Due 5 p.m. 12/13/1999 | Absolutely no extensions! |
Reading References: ( MSE library reserve room)
1. Introduction to Microelectronic Fabrication , Richard C. Jaeger, Volume V; Modular Series on Solid State Devices , G. W. Neudeck and R.F. Pierret eds., Addison-Wesley, 1993.
2. Silicon as Mechanical Material , K. E. Petersen, Proceedings of IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
3. Soft Lithography , Younan Xia and George M. Whitesides, Angewandte Chemie, International Edition, 37, 550-575, 1998.
4. Instrumental Methods of Chemical Analysis , Chapter 17, Conductimetry, Calen W. Ewing, McGraw Hill Company, Fourth Edition, 1975.
5. Design, Fabrication and Testing of Planar Interdigitated Capacitors for Biosensor Transducers , A.G. Andreou, M.J. Lenkevich and N.A. Blum, Technical Report JHU/ECE-87/16.
6. Microdielectrometry , N.F. Sheppard, D.R.Day, H.L. Lee and S.D. Senturia, Sensors and Actuators, 2, 263-274, 1982.
7. Acetylcholine Receptor-Based Biosensor , M.E. Eldefrawi, S.M. Sherby, A.G. Andreou, N.A. Mansour, Z. Annau, N.A. Blum and J.J. Valdes, Analytical Letters, 21(9), 1665-1680, 1988.
8. Filar Electrodes: Steady-state Currents and Spectroelectrochemistry at Twin Interdigitated Electrodes, D.G. Sanderson and L.B. Anderson, Anal. Chem., 57, 2388-2393, 1985.
9. Planar Amperometric Enzyme-based Glucose Microelectrode, M.Koudelka, S. Gernet and N.F.De Rooij, Sensor and Actuators, 18, 157-165, 1989.
10. Micro-biosensor for Clinical Analyses, E. Tamiya and I. Karube, Sensors and Actuators, 15, 199-207, 1988.
11. Solid-state Humidity Sensors, P.P.L. Regtien, Sensors and Actuators, 2, 85-95, 1981/82.
12. CO, CO2, CH4, and H20 Sensing by Polymer Covered Interdigitated Electrode Structures, E.C.M. Hermans, Sensors and Actuators, 5, 181-186, 1984.
Web Pages from Previous Years
1994 Final Project Report by Tim Edwards.
1998 Microfabrication Laboratory WWW page.
Useful Local Links
Links to Equipment and Supplies
University Links to Microfabrication, Soft Lithography and MEMS
University of Michigan MEMS page
U.C. Davis microfabrication laboratory
Caltech micromachining laboratory
Acknowledgements
This course is supported by a Whitaker Foundation Development grant and by Kenan grants from the Whiting School of Engineering.
To see a layout of our new facility (to be) in the Biomedical Engineering Institute at Homewood campus click
here!
