520.494/580.495 Microfabrication Laboratory
Homework Assignment #2
Reading:
Chapter 3 of Jaeger
Questions:
Do problems 3.1 through 3.9 in the textbook.
Note changes below.
3.6 Use a spreadsheet program such as Microsoft Excel for the calculation.
Set
up a table like the one below.
|
|
Dry |
|
Wet |
|
|
Temp |
Linear |
Parabolic |
Linear |
Parabolic |
|
950 |
|
|
|
|
|
1000 |
|
|
|
|
|
1050 |
|
|
|
|
|
1100 |
|
|
|
|
|
1150 |
|
|
|
|
|
1200 |
|
|
|
3.9 Use a spreadsheet program such as Microsoft Excel for the calculation.
Set
up a table like the one below.
|
Oxide
thickness |
0.5 |
microns |
|
|
|
|
|
|
|
|
|
|
Dry |
|
Wet |
|
|
Temp |
<100> |
<111> |
<100> |
<111> |
|
950 |
|
|
|
|
|
1000 |
|
|
|
|
|
1050 |
|
|
|
|
|
1100 |
|
|
|
|
|
1150 |
|
|
|
|
|
1200 |
|
|
|
|