DS 101 1 10; 9 FrontBackAlignment; L NG; B 5000000 25000000 35000000 12500000; B 25000000 5000000 0 -22500000; L NM; B 25000000 5000000 0 -22500000; B 5000000 25000000 -35000000 12500000; DF; DS 102 1 10; 9 BondPad1; L NM; B 4000000 4000000 0 0; DF; DS 103 1 10; 9 R1; L NC; B 150000 150000 750000 0; B 150000 150000 -750000 0; L ND; B 1750000 250000 0 0; DF; DS 104 1 10; 9 R2; L NM; B 3300000 350000 -750000 500000; B 3300000 350000 -750000 -500000; B 350000 1350000 2225000 0; C 103 R 100 0 T 1475000 500000; C 103 R 100 0 T 1475000 -500000; DF; DS 105 1 10; 9 R3; L NM; B 350000 4300000 1375000 0; B 350000 4300000 -1375000 0; L ND; B 3000000 250000 0 -1975000; L NC; B 150000 150000 -1375000 -1975000; B 150000 150000 1375000 -1975000; DF; DS 106 1 10; 9 BondPad2; L NM; B 2000000 2000000 0 0; DF; DS 107 1 10; 9 RDiff1; C 106 R 100 0 T 13500000 0; L NM; B 350000 350000 12375000 125000; B 350000 350000 -12375000 125000; C 106 R 100 0 T -13500000 0; L ND; B 25000000 250000 0 125000; L NC; B 150000 150000 -12375000 125000; B 150000 150000 12375000 125000; DF; DS 108 1 10; 9 RMetal1; L NM; B 250000 2500000 -875000 -13500000; B 250000 2500000 875000 13500000; C 106 R 100 0 T 0 13750000; C 106 R 100 0 T 0 -13750000; B 1125000 250000 -437500 12375000; B 1125000 250000 437500 -12375000; B 250000 25000000 875000 0; B 250000 25000000 0 0; B 250000 25000000 -875000 0; DF; DS 109 1 10; 9 AlignC; L NC; B 176000 108000 0 50000; B 9000 80000 -76500 -44000; B 9000 80000 -59500 -44000; B 9000 80000 -42500 -44000; B 9000 80000 -8500 -44000; B 9000 80000 8500 -44000; B 9000 80000 42500 -44000; B 9000 80000 59500 -44000; B 9000 80000 -25500 -44000; B 9000 80000 25500 -44000; B 9000 80000 76500 -44000; B 7000 100000 84500 -54000; B 7000 100000 -84500 -54000; B 77000 20000 -42500 -94000; B 77000 20000 42500 -94000; B 8000 12000 0 -98000; DF; DS 110 1 10; 9 AlignCM; L NM; B 8000 80000 64000 -42000; B 8000 80000 48000 -42000; B 8000 80000 32000 -42000; B 8000 80000 16000 -42000; B 8000 90000 0 -47000; B 8000 80000 -16000 -42000; B 8000 80000 -32000 -42000; B 8000 80000 -48000 -42000; B 8000 80000 -64000 -42000; C 109 R 100 0 M Y T 0 0; DF; DS 111 1 10; 9 Align4; C 110 R 0 -100 T 0 -104000; C 110 R 100 0 T 0 88000; DF; DS 112 1 10; 9 AlignM; L NM; B 8000 80000 -68000 -5000; B 8000 80000 -51000 -5000; B 8000 80000 -34000 -5000; B 8000 80000 -17000 -5000; B 8000 90000 0 0; B 8000 80000 17000 -5000; B 8000 80000 34000 -5000; B 8000 80000 51000 -5000; B 8000 80000 68000 -5000; DF; DS 113 1 10; 9 AlignD; L ND; B 77000 20000 42500 94000; B 8000 12000 0 98000; B 77000 20000 -42500 94000; B 7000 100000 84500 54000; B 7000 100000 -84500 54000; B 13000 80000 74500 44000; B 8000 80000 56000 44000; B 8000 80000 40000 44000; B 8000 80000 24000 44000; B 8000 80000 8000 44000; B 8000 80000 -8000 44000; B 8000 80000 -24000 44000; B 8000 80000 -40000 44000; B 8000 80000 -56000 44000; B 13000 80000 -74500 44000; B 176000 108000 0 -50000; DF; DS 114 1 10; 9 AlignDM; C 112 R 100 0 M Y T 0 -47000; C 113 R 100 0 T 0 0; DF; DS 115 1 10; 9 Align3; C 114 R 0 -100 T 0 -104000; C 114 R 100 0 T 0 88000; DF; DS 116 1 10; 9 AlignDC; C 109 R 100 0 T 0 0; C 113 R 100 0 T 0 0; DF; DS 117 1 10; 9 Align2; C 116 R 0 -100 T 0 -104000; C 116 R 100 0 T 0 88000; DF; DS 118 1 10; 9 AlignO; L NG; B 77000 20000 -42500 -94000; B 8000 12000 0 -98000; B 77000 20000 42500 -94000; B 7000 100000 84500 -54000; B 7000 100000 -84500 -54000; B 9000 80000 76500 -44000; B 9000 80000 59500 -44000; B 9000 80000 42500 -44000; B 9000 80000 25500 -44000; B 9000 80000 8500 -44000; B 9000 80000 -8500 -44000; B 9000 80000 -25500 -44000; B 9000 80000 -42500 -44000; B 9000 80000 -59500 -44000; B 9000 80000 -76500 -44000; B 176000 108000 0 50000; DF; DS 119 1 10; 9 AlignDO; C 118 R 100 0 T 0 0; C 113 R 100 0 T 0 0; DF; DS 120 1 10; 9 Align1; C 113 R 0 -100 T 0 -104000; C 118 R 0 100 M Y T 0 -104000; C 119 R 100 0 T 0 88000; DF; DS 121 1 10; 9 ContactChain3; L NC; B 20000 20000 60000 0; B 20000 20000 0 0; L ND; B 100000 40000 30000 0; L NM; B 100000 40000 -30000 0; DF; DS 122 1 10; 9 MicroDevice; C 111 R 100 0 T -1886000 2982000; C 115 R 100 0 T -1216000 2982000; C 117 R 100 0 T -596000 2982000; C 120 R 100 0 T 0 2982000; L ND; B 10000 50000 0 3320000; B 50000 10000 0 3320000; L NC; B 50000 50000 40000 3360000; L NM; B 10000 30000 -25000 3355000; L NC; B 50000 50000 -40000 3360000; B 50000 50000 40000 3280000; B 50000 50000 -40000 3280000; B 30000 30000 0 3270000; B 30000 30000 0 3370000; B 30000 30000 50000 3320000; B 30000 30000 -50000 3320000; B 60000 20000 0 3320000; B 20000 60000 0 3320000; L NM; B 30000 10000 35000 3295000; B 10000 40000 45000 3320000; B 60000 10000 0 3275000; B 10000 30000 -25000 3285000; B 30000 10000 -35000 3295000; B 10000 40000 -45000 3320000; B 60000 10000 0 3365000; B 30000 10000 -35000 3345000; B 10000 30000 25000 3355000; B 30000 10000 35000 3345000; B 10000 30000 25000 3285000; L NG; B 50000 50000 -40000 3280000; B 50000 50000 40000 3280000; B 50000 50000 40000 3360000; B 50000 50000 -40000 3360000; B 30000 30000 -50000 3320000; B 30000 30000 0 3270000; B 30000 30000 0 3370000; B 30000 30000 50000 3320000; B 60000 20000 0 3320000; B 20000 60000 0 3320000; C 121 R 100 0 T -310000 -3070000; L NM; B 300000 300000 -540000 -3070000; C 121 R 100 0 T -190000 -3070000; C 121 R 100 0 T -70000 -3070000; C 121 R 100 0 T 50000 -3070000; C 121 R 100 0 T 170000 -3070000; C 121 R 100 0 T 290000 -3070000; C 121 R 100 0 T 410000 -3070000; C 121 R 100 0 T 530000 -3070000; C 121 R 100 0 T 650000 -3070000; C 121 R 100 0 T 770000 -3070000; C 121 R 100 0 T 890000 -3070000; C 121 R 100 0 T 1010000 -3070000; C 121 R 100 0 T 1130000 -3070000; C 121 R 100 0 T 1250000 -3070000; C 121 R 100 0 T 1370000 -3070000; C 121 R 100 0 T 1490000 -3070000; C 121 R 100 0 T 1610000 -3070000; B 300000 300000 2020000 -3070000; L NC; B 20000 20000 1790000 -3070000; B 20000 20000 1730000 -3070000; L ND; B 100000 40000 1760000 -3070000; L NM; B 100000 40000 1700000 -3070000; B 100000 40000 1820000 -3070000; L ND; B 500000 500000 2875000 2875000; B 200000 100000 2525000 2675000; L NC; B 50000 50000 2475000 2675000; L NM; B 300000 300000 2400000 2670000; L ND; B 200000 100000 3225000 3075000; B 100000 200000 3075000 2525000; B 100000 200000 2675000 3225000; L NC; B 50000 50000 2675000 3275000; B 50000 50000 3275000 3075000; B 50000 50000 3075000 2475000; L NM; B 300000 300000 3075000 2400000; B 300000 300000 3350000 3075000; B 300000 300000 2675000 3350000; L ND; B 500000 500000 -2875000 -2875000; B 200000 100000 -3225000 -3075000; L NC; B 50000 50000 -3275000 -3075000; L NM; B 300000 300000 -3350000 -3080000; L ND; B 200000 100000 -2525000 -2675000; B 100000 200000 -2675000 -3225000; B 100000 200000 -3075000 -2525000; L NC; B 50000 50000 -3075000 -2475000; B 50000 50000 -2475000 -2675000; B 50000 50000 -2675000 -3275000; L NM; B 300000 300000 -2675000 -3350000; B 300000 300000 -2400000 -2675000; B 300000 300000 -3075000 -2400000; B 20000 2450000 -3240000 785000; B 20000 2400000 -3150000 760000; B 20000 2400000 -2950000 760000; B 400000 400000 -3050000 -690000; B 400000 400000 -3050000 2210000; B 20000 2400000 -3050000 760000; B 20000 2450000 -2860000 735000; B 110000 20000 -3195000 -430000; B 120000 20000 -3000000 -430000; B 120000 20000 -3100000 1950000; B 110000 20000 -2905000 1950000; L NG; B 4440000 4440000 0 0; L ND; B 175000 25000 -1712500 55000; L NC; B 15000 15000 -1787500 55000; B 15000 15000 -1637500 55000; L ND; B 175000 25000 -1712500 -45000; L NC; B 15000 15000 -1787500 -45000; B 15000 15000 -1637500 -45000; L ND; B 175000 25000 1712500 -45000 -100 0; L NC; B 15000 15000 1787500 -45000 -100 0; B 15000 15000 1637500 -45000 -100 0; L ND; B 175000 25000 1712500 55000 -100 0; L NC; B 15000 15000 1787500 55000 -100 0; B 15000 15000 1637500 55000 -100 0; L NM; B 1000000 1000000 -3000000 3000000; L NC; B 15000 15000 137500 1787500; B 15000 15000 -137500 1787500; L ND; B 300000 25000 0 1787500; L NM; B 35000 430000 -137500 1985000; B 35000 430000 137500 1985000; B 1000000 1000000 1500000 3000000; B 1000000 1000000 -1500000 -3000000; B 1000000 1000000 -3000000 -1500000; B 35000 135000 -1637500 5000; B 330000 35000 -1935000 -45000; B 330000 35000 -1935000 55000; B 35000 135000 1637500 5000 -100 0; B 330000 35000 1935000 -45000 -100 0; B 330000 35000 1935000 55000 -100 0; L NC; B 15000 15000 137500 -1787500; B 15000 15000 -137500 -1787500; L ND; B 300000 25000 0 -1787500; L NM; B 35000 430000 -137500 -1985000; B 35000 430000 137500 -1985000; B 1000000 1000000 3000000 -3000000; B 1000000 1000000 3000000 1500000; L ND; B 15000 150000 -959500 3090000; B 15000 150000 -1003500 3090000; B 15000 150000 -1047500 3090000; B 15000 150000 -402500 3090000; B 15000 150000 -446500 3090000; B 15000 150000 155500 3100000; L NC; B 250000 8000000 3875000 0; B 8000000 250000 0 3875000; B 8000000 250000 0 -3875000; B 250000 8000000 -3875000 0; L NM; B 35000 600000 137500 2300000; B 35000 600000 -137500 2300000; B 1880000 100000 1060000 2550000; B 3380000 100000 -1810000 2550000; B 3380000 100000 1810000 -2550000; B 35000 600000 137500 -2300000; B 35000 600000 -137500 -2300000; B 1880000 100000 -1060000 -2550000; B 100000 1962500 2550000 1018750; B 100000 3472500 2550000 -1763750; B 600000 35000 2300000 -45000; B 600000 35000 2300000 55000; B 100000 3462500 -2550000 1768750; B 600000 35000 -2300000 55000; B 600000 35000 -2300000 -45000; B 100000 1972500 -2550000 -1013750; DF; DS 123 1 10; 9 Micro4by4; C 122 R 100 0 T 11625000 11625000; C 122 R 100 0 T 11625000 3875000; C 122 R 100 0 T 11625000 -3875000; C 122 R 100 0 T 11625000 -11625000; C 122 R 100 0 T 3875000 11625000; C 122 R 100 0 T 3875000 3875000; C 122 R 100 0 T 3875000 -3875000; C 122 R 100 0 T 3875000 -11625000; C 122 R 100 0 T -3875000 11625000; C 122 R 100 0 T -3875000 3875000; C 122 R 100 0 T -3875000 -3875000; C 122 R 100 0 T -3875000 -11625000; C 122 R 100 0 T -11625000 11625000; C 122 R 100 0 T -11625000 3875000; C 122 R 100 0 T -11625000 -3875000; C 122 R 100 0 T -11625000 -11625000; DF; DS 124 1 10; 9 ContactChain1; L NC; B 150000 150000 425000 0; B 150000 150000 -25000 0; L ND; B 700000 250000 200000 0; L NM; B 700000 350000 -200000 0; DF; DS 125 1 10; 9 ContactChain2; C 106 R 100 0 T 13350000 0; L NM; B 700000 350000 12000000 125000; B 700000 350000 11200000 125000; L ND; B 700000 250000 11600000 125000; L NC; B 150000 150000 11375000 125000; B 150000 150000 11825000 125000; C 106 R 100 0 T -13350000 0; C 124 R 100 0 T 10600000 125000; C 124 R 100 0 T 9800000 125000; C 124 R 100 0 T 9000000 125000; C 124 R 100 0 T 8200000 125000; C 124 R 100 0 T 7400000 125000; C 124 R 100 0 T 6600000 125000; C 124 R 100 0 T 5800000 125000; C 124 R 100 0 T 5000000 125000; C 124 R 100 0 T 4200000 125000; C 124 R 100 0 T 3400000 125000; C 124 R 100 0 T 2600000 125000; C 124 R 100 0 T 1800000 125000; C 124 R 100 0 T 1000000 125000; C 124 R 100 0 T 200000 125000; C 124 R 100 0 T -600000 125000; C 124 R 100 0 T -1400000 125000; C 124 R 100 0 T -2200000 125000; C 124 R 100 0 T -3000000 125000; C 124 R 100 0 T -3800000 125000; C 124 R 100 0 T -4600000 125000; C 124 R 100 0 T -5400000 125000; C 124 R 100 0 T -6200000 125000; C 124 R 100 0 T -7000000 125000; C 124 R 100 0 T -7800000 125000; C 124 R 100 0 T -8600000 125000; C 124 R 100 0 T -9400000 125000; C 124 R 100 0 T -10200000 125000; C 124 R 100 0 T -11000000 125000; C 124 R 100 0 T -11800000 125000; DF; DS 126 1 10; 9 WSE; L NM; B 1280000 160000 0 1320000; B 1440000 80000 0 -960000; B 800000 80000 0 -800000; B 160000 80000 0 -640000; B 1760000 80000 0 80000; B 1600000 560000 0 -240000; B 160000 960000 480000 600000; B 160000 960000 160000 600000; B 160000 960000 -160000 600000; B 160000 960000 -480000 600000; B 1120000 160000 0 1160000; B 800000 160000 0 1480000; B 480000 160000 0 1640000; B 160000 720000 0 2480000; B 320000 320000 0 1960000; B 320000 80000 0 1760000; B 480000 80000 0 -720000; B 1120000 80000 0 -880000; B 1760000 80000 0 -1040000; B 2080000 80000 0 -1120000; B 2400000 80000 0 -1200000; B 2720000 80000 0 -1280000; B 3040000 80000 0 -1360000; B 3360000 80000 0 -1440000; B 3680000 80000 0 -1520000; B 1520000 80000 -1080000 -560000; B 1360000 80000 -1160000 -640000; B 1200000 80000 -1240000 -720000; B 1040000 80000 -1320000 -800000; B 880000 80000 -1400000 -880000; B 720000 80000 -1480000 -960000; B 560000 80000 -1560000 -1040000; B 400000 80000 -1640000 -1120000; B 240000 80000 -1720000 -1200000; B 80000 80000 -1800000 -1280000; B 1520000 80000 1080000 -560000; B 1360000 80000 1160000 -640000; B 1200000 80000 1240000 -720000; B 1040000 80000 1320000 -800000; B 880000 80000 1400000 -880000; B 720000 80000 1480000 -960000; B 560000 80000 1560000 -1040000; B 400000 80000 1640000 -1120000; B 240000 80000 1720000 -1200000; B 80000 80000 1800000 -1280000; B 880000 240000 -1400000 -2640000; B 960000 160000 -1360000 -2440000; B 1040000 80000 -1320000 -2320000; B 1120000 80000 -1280000 -2240000; B 1200000 80000 -1240000 -2160000; B 1360000 80000 -1160000 -2080000; B 1520000 80000 -1080000 -2000000; B 1360000 80000 1160000 -2080000; B 1520000 80000 1080000 -2000000; B 880000 240000 1400000 -2640000; B 960000 160000 1360000 -2440000; B 1040000 80000 1320000 -2320000; B 1120000 80000 1280000 -2240000; B 1200000 80000 1240000 -2160000; B 1760000 80000 960000 -1920000; B 1760000 80000 -960000 -1920000; B 3680000 320000 0 -1720000; B 3680000 80000 0 -2800000; DF; DS 127 1 10; 9 PXMask; C 101 R 100 0 T 0 -12500000; C 102 R 100 0 T -23000000 -18000000; C 102 R 100 0 T 18000000 23000000; C 102 R 100 0 T 23000000 18000000; C 102 R 100 0 T 23000000 -23000000; C 102 R 100 0 T -18000000 -23000000; C 104 R 100 0 T -19600000 0; L NM; B 1000000 19675000 -21500000 -10162500; B 1000000 24675000 -21500000 12662500; C 104 R -100 0 T 19600000 0; B 1000000 24675000 21500000 -12662500; B 1000000 19675000 21500000 10162500; C 105 R 100 0 M Y T 0 -19850000; B 18800000 1000000 -10600000 -21500000; B 23800000 1000000 13100000 -21500000; B 23800000 1000000 -13100000 21500000; B 18800000 1000000 10600000 21500000; C 105 R 100 0 T 0 19850000; L NC; B 250000 3417210 -29875000 0; B 250000 3417210 30125000 0; B 3417210 250000 0 -29875000; B 3417210 250000 0 30125000; C 107 R 100 0 T -2500000 24000000; C 102 R 100 0 T -23000000 23000000; C 108 R 100 0 T -24000000 1750000; C 123 R 100 0 T 0 0; C 125 R 100 0 T 1650000 -24000000; C 126 R 100 0 T 25405000 455000; DF; C 127; E