520/580.495 Microfabrication Laboratory

Pre-laboratory Write-ups

Pre-labs are due at the beginning of lab period. They account for 10% of your lab report grade. All work should be done neatly in your lab notebook, dated appropriately, and copied for submission. If you wish, you may type the Pre-lab and tape/paste it into your lab notebook. Each Pre-lab should require 30 minutes or less of work.

The purpose of the Pre-lab is to solidify in your mind the sequence of and purpose behind the procedures for the day. This will help the laboratory run more efficiently and safely. There are two components to the Pre-labs:

1. The madness behind the method. Catalogue the reasons for each step in the procedure, i.e., each solution used, each baking step, etc. If you have described the reason for a step in a previous Pre-lab, you may reference that description rather than retyping it each time. If you do not know why a certain step is performed, note the fact that you don’t know, find out from the TA or Professor during the lab session, and include it with your Lab Report.
  1. Diagram your wafer. Draw a sequence of schematic diagrams that show how your wafer will change throughout the procedure.
  2. Additional problems. Complete any additonal Pre-lab assignments/problems given on the lab procedures handout.

Laboratory Reports

Lab Reports are due at the beginning of the following week’s lab period. They account for 90% of your lab report grade. All work should be done neatly in your lab notebook, dated appropriately, and copied for submission. Lab Reports will vary in the amount of time required, but in general should not require more than a couple of hours of work. Most of the work will be completed in lab.

The purpose of the Lab Report is to document changes in the protocol, record your observations made during lab and analyze your results. There are four components to the Reports:

1. Purpose of the laboratory. List the instructional goals of this week’s lab as you see them.

2. Procedure. Reference the Laboratory Procedure Handout and include it in your lab notebook. You do not need to rewrite the procedures step-by-step. Note any changes made to the procedure and the reasons they were made. Also, note any problems or mistakes you encounter. This section must be handwritten in your notebook.

3. Observations. Include all relevant results from the lab. This section must be handwritten in your notebook.

4. Discussion. Include the analysis of your results and any important sources of error. If you wish, this section may be typed and taped/pasted into your notebook.

Final Project Report

Please see Laboratory assignment # 10.