Time and Place

CAD Computers (MEMSPro and Tanner Tools) : Room 120, Barton Hall, anytime.

Process Information and Design Rules

PolyMUMPs

Design manual (local copy)

SOIMUMPs

Design manual (local copy)

MetalMUMPs

Design manual (local copy)

ASIMPS

CMOS-MEMS from  Jazz Semiconductor and Carnegie Mellon University

SPICE and Tanner Tools

To get help with SPICE check out the eCIRCUIT center! Find out where to download nice free versions of SPICE and follow the tutorials that can help you get started. You can get an evaluation version of SMASH here .

MEMSPro User Guide (zipped pdf) -password protected-

LEDIT User Guide (zipped pdf) -password protected-

LEDIT Quick Reference Guide (pdf)

Microsystem CAD tools links