CAD Computers (MEMSPro and Tanner Tools) : Room 120, Barton Hall, anytime.
Process Information and Design Rules
Design manual (local copy)
Design manual (local copy)
Design manual (local copy)
CMOS-MEMS from Jazz Semiconductor and Carnegie Mellon University
SPICE and Tanner Tools
To get help with SPICE check out the eCIRCUIT center! Find out where to download nice free versions of SPICE and follow the tutorials that can help you get started. You can get an evaluation version of SMASH here .
MEMSPro User Guide (zipped pdf) -password protected-
LEDIT User Guide (zipped pdf) -password protected-
LEDIT Quick Reference Guide (pdf)
Microsystem CAD tools links