JHU 520/530.487 Introduction to MEMS

Staff

Professor Andreas G. Andreou, Barton Hall 400B, (410)-516-8361

andreou at jhu dot edu

Course Logistics

Time and Place
Grading
Laboratory Work
Course Websites: www.ece.jhu.edu/faculty/andreou/487

Course Ethics

Homework and pre-laboratory assignments: Developing the ability to work within a group is certainly one of the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate. During the laboratory sessions you must follow all proper procedures to avoid injuring yourself or anyone else that works with you.

Textbook

Microsystem Design

4th printing, 2002

Stephen Senturia

Kluwer Academic Publishers

ISBN 0-7923-7246-8

WWW book site at MIT

Checkout update page on errors and glitches in the book

Week	Lecture Topics	Reading Assignment	Laboratory Assignment
1.1	Introduction to MEMS Handout 1.1a	Chapter 1 Nathanson et. al. 1967 paper
1.2	Conductors, semiconductors and insulators, Silicon Handout 1.2a Process integration and foundry technologies Handout 1.2b	Chapter 4
1.3	Microfabrication and microengineering Handout 1.3a	Chapter 2 Chapter 3
2.1	Lumped modeling with circuit elements Handout 2.1a	Chapter 5 Tilmans 1996/1997 paper I, paper II, errata Choi and Connelly 1989 paper	MATLAB as part of Homework
2.2	Energy conserving transducers Handout 2.1a	Chapter 6 Chapter 21.4.1, 21.5.1 Appendix B Chapters 11.1, 11.2 Chapters 18.1, 18.2.1, 18.2.2, 18.2.3
2.3	CAD Tools (I) CAD principles and simulation. Lumped elements system simulation Handout 2.3a CAD Tools (II) Structured Design MEMSCAP environment. Handout 2.3b	Schwarz and Schneider 2001 paper Senturia 1998 paper Mukherjee et. al. 2000 paper Fedder 2003 paper
2.4	MEMSPro Part I: schematic capture, and simulation (SEDIT/TSPICE) Laboratory 1		SEDIT/TSPICE Files
3.1	Macromodeling using SPICE Laboratory 2
3.2	MEMSPro Part II: physical layout and verification (LEDIT/LVS) Laboratory 3		LEDIT/LVS Files
3.3	MEMSPro Part III: silicon compilation (UPI/LComp) Laboratory 4		UPI/LComp Files
4.1	Elasticity and mechanics Handout 4.1	Chapter 8
4.2	Structures Handout 4.2	Chapter 9
4.3	Beam deflection Lab Laboratory 5a Laboratory 5b
4.4	Ampifiers Handout 4.4a Noise in electronic systems Handout 4.4a, Handout 4.4b Noise in mechanical systems Handout 4.4c	Chapter 14 Chapter 16 Haus 1960 paper Netzer 1981 paper Gabrielson 1993 paper LaHaye et. al. 2004 paper
5.1	Heat and Fluids Handout 5.1a System example: Chip-scale cell incubator Andreou Lab (Blain) Handout 5.1b	Chapter 11 Chapter 13 Blain and Andreou 2007 paper
5.2	Nanogram RoboCup soccer Handout 5.2a PolyMUMPS Process Flow Handout 5.2b	Craig McGray Ph.D. Dissertation
5.3	MEMS scaling laws Handout 5.3a Optoelectronic MEMS Andreou Lab (Tejada) Handout 5.3b 3D SOI-CMOS MEMS Andreou Lab (Tejada) Handout 5.3c Polymer MEMS Andreou Lab (Choi) Handout 5.3d	Sasaki et. al. 1999 paper Hall and Degertekin 2002 paper Tejada et. al. 2004 paper I Tejada and Andreou 2006 paper II Choi et.al. 2006 paper
5.4	Final project Handout FinalProjectFiles	PolyMUMPS Design Handbook Handout	Tanner PolyMUMPS tdb file

Bibliography

1. The Feynmann Lectures On Physics, (Volume I, Volume II, Volume III), R.P. Feynman, R.B. Leighton and M. Sands, Addison-Wesley Publishing Company, Reading, MA, 1964.

2. Fundamentals of Microfabrication : The Science of Miniaturization, Marc J. Madou, CRC Press, 2nd edition, 2002.

3. MEMS and Microsystems: Design and Manufacture, Tai-Ran Hsu, McGraw-Hill, 2002.

4. Micromachined Transducers Sourcebook, Gregory T. A. Kovacs, WCB, 1998.

5. An Introduction to Microelectromechanical Systems Engineering, Nadim Maluf, Artech House, 2000.

6. Fundamentals of Microsystems Packaging, Rao R. Tummala, McGraw-Hill, 2001.

7. Micromechanics and MEMS: Classic and Seminal Papers to 1990, W.S. Trimmer (edited), IEEE press, 1991.

8. Silicon as Mechanical Material , K. E. Petersen, Proceedings of IEEE, vol. 70, no. 5, pp. 420-457, May 1982 (pdf).

9. Macromodeling with SPICE, J.A. Connelly and P. Choi, Prentice Hall, 1992.

MEMS Resources

MEMS manufacturers and products

Frequently Asked Questions

How do I ... ? FAQ

Homework #1: Due June 2, 2008	Solutions to Homework #1
Homework # 2: Due June 16, 2008 Questions in Laboratory assignment 2	Solutions to Homework #2
Homework # 3: Due June 23, 2008 Questions in Laboratory assignment 5a	Solutions to Homework #3