|
Microsystem Design 4th printing, 2002 Kluwer Academic Publishers ISBN 0-7923-7246-8
Checkout update page on errors and glitches in the book |
 |
StaffProfessor Andreas G. Andreou, 410-516-8361 andreou at jhu dot edu Professor William N. Sharpe Jr., Latrobe Hall 126, 410-516-7101 sharpe at jhu dot edu Ed Choi, Class Assistant, 410-516-0258 ; office Hours: Tuesday 4 - 5.30 P.M. Dan Gianola, Latrobe Hall 22; office hours 2-3 Wednesday gianola at jhu dot edu Course Logistics
Course EthicsHomework and pre-laboratory assignments : Developing the ability to work within a group is certainly one of the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate. During the laboratory sessions you must follow all proper procedures to avoid injuring yourself or anyone else that works with you.Textbook
|
|
Microsystem Design 4th printing, 2002 Kluwer Academic Publishers ISBN 0-7923-7246-8
Checkout update page on errors and glitches in the book |
|
Schedule and Syllabus
| Week | Lecture Topics | Reading Assignment | Laboratory Assignment |
| 1 |
Introduction to MEMS Handout
1a (WNS) Materials and processes Handout 1b (WNS) |
Chapter 1 Chapters 2, 3 |
|
| 2 | Yet another introduction to MEMS
Handout 2a , ( Movie ) (AGA) Fields, matter and waves, physics of transduction, piezoresistance. Handout 2b (AGA) Silicon and electrical conductivity Handout 2c (AGA) |
Appendix B Chapters 11.1, 11.2 Chapters 18.1, 18.2.1, 18.2.2, 18.2.3 Review of fields, waves and vector calculus from Feynman's Physics Volume II (Chapters 1-4) or Haus and Melcher online book (Chapters 1-3) http://web.mit.edu/6.013_book/www/ |
MATLAB as part of Homework #2 |
| 3 | Elasticity; mechanics
Handout
3a (WNS) Structures Handout 3b (WNS) |
Chapter 8
Chapter 9 |
Beams characterization |
| 4 | Review of complex exponentials Handout 4a (AGA) Lumped modeling with circuit elements Handout 4b (AGA) Energy conserving transducers Handout 4c (WNS) |
Chapter 5 Tilmans 1996/1997 paper I, paper II, errata Choi and Connelly 1989 paper
Chapter 6.1, 6.2, 6.3, 6.4 Chapter 21.4.1, 21.5.1 |
Macromodeling and simulation with SPICE |
| 5 | CAD Tools (I) CAD principles and simulation. Handout 5a (AGA) MEMSCAP environment. Handout 5b (AGA) |
Senturia 1998
paper Mukherjee et. al. 2000 paper Schwarz and Schneider 2001 paper Fedder 2003 paper |
|
| 6 |
PolyMUMPs Technology
Handout 6a (WNS)
CAD Tools (II) SUGAR Handout 6b (DG) ANSYS, FEMLAB |
Chapter 4
PolyMUMPS technology handout
SUGAR: Clark et. al. 2000 paper and 2002 paper
|
|
| 7 | Midterm Examination -in class- (WNS)
Heat Flow Handout 7a (WNS) |
Chapter 11, 12 |
MEMSPro Part I: schematic capture, and simulation (SEDIT/TSPICE) Lab Sedit/TSPICE Files (zip) |
| 8 |
|
SPRING BREAK |
|
| 9 | Fluids
Handout 8a (WNS) Optoelectronic MEMS DMD and GLV Handout 8b (WNS) |
Chapter 13 |
MEMSPro Part II: physical layout and verification (LEDIT/LVS)
Files (zip) |
| 10 | Amplifiers and feedback Handout 9a (AGA) Noise I Handout 9b, Handout 9c (AGA)
|
Chapter 16 Haus 1960 paper Netzer 1981
paper |
|
| 11 | Noise II Handout 10a (AGA)
Electrical interfaces (I) Piezoresistive interface Handout 10b (AGA) |
Gabrielson 1993
paper LaHaye et. al. 2004 paper
Chapter 18.1, 18.2.1, 18.2.2, 18.2.3, 18.2.4, 18.3.4, 18.3.5, 18.3.6, 18.3.7 |
MEMSPro Part III silicon compilation (UPI/LComp) Files (zip) |
| 12 |
Optoelectronic interfaces; Handout 11a (AGA) Silicon on Sapphire MEMS Handout 11b (AGA) |
Sasaki et. al. 1999 paper Hall and Degertekin 2002 paper
Tejada et. al. 2004, |
|
| 13 |
MEMS
scaling
laws
Handout 12a (AGA) MEMS in Medicine and Biology (Prof. N. Thakor) |
MEMS project work
Files (zip) Due: May 14th 5 p.m. |
Homework Assignments and Solutions
| Homework #1: Due February 5th | Solutions to Homework #1 |
| Homework # 2: Due February 13th (Friday) | Solutions to Homework #2 |
| Homework # 3: Due February 19th | Solutions to Homework #3 |
| Homework # 4: Due February 26th | Solutions to Homework #4 |
| Solutions to Laboratory #2 | |
| Midterm Examination (Thursday March 11th) | Solutions to Midterm |
| Homework # 5: Due April 2nd | Solutions to Homework #5 |
| Homework # 6: Due April 9th | Solutions to Homework #6 |
All file archives and documents are password protected!
|
CAD Laboratory
and Project Resources Bibliography 1. The Feynmann Lectures On Physics, (Volume I, Volume II, Volume III), R.P. Feynman, R.B. Leighton and M. Sands, Addison-Wesley Publishing Company, Reading, MA, 1964. 2. Fundamentals of Microfabrication : The Science of Miniaturization, Marc J. Madou, CRC Press, 2nd edition, 2002. 3. MEMS and Microsystems: Design and Manufacture, Tai-Ran Hsu, McGraw-Hill, 2002. 4. Micromachined Transducers Sourcebook, Gregory T. A. Kovacs, WCB, 1998. 5. An Introduction to Microelectromechanical Systems Engineering, Nadim Maluf, Artech House, 2000. 6. Fundamentals of Microsystems Packaging, Rao R. Tummala, McGraw-Hill, 2001. 7. Micromechanics and MEMS: Classic and Seminal Papers to 1990, W.S. Trimmer (edited), IEEE press, 1991. 8. Silicon as Mechanical Material , K. E. Petersen, Proceedings of IEEE, vol. 70, no. 5, pp. 420-457, May 1982 (pdf). 9. Macromodeling with SPICE, J.A. Connelly and P. Choi, Prentice Hall, 1992. MEMS Resources MEMS manufacturers and products Frequently Asked Questions How do I ... ? FAQ Related JHU Links Whitaker Lithography and Fabrication Lab 520.773 Advanced Topics in Fabrication and Micro-engineering 520/530/580.495 Microfabrication Laboratory 540.440/540.640 Chemical Engineering for Micro and Nano Technology |
Course Archives
| 2003 |