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520/530.487 Introduction to Micro-electromechanical Systems (MEMS) A first course on the principles and engineering of micro-electromechanical systems. An introduction to materials and basic devices with examples of applications for sensing and actuation. Lectures will be complemented with a set of laboratory experiments.
Spring 2003 |
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Professor Andreas G. Andreou, Stieff Bldg. 120, 410-516-8361 Professor William N. Sharpe Jr., Latrobe Hall 126 , 410-516-7101 sharpe@jhu.edu Professor Kevin J. Hemker, Latrobe Hall, 410-516-4489, hemker@jhu.edu Teaching Assistants and Graders: Edward Choi, ECE, echoi@jhu.edu
Homework and pre-laboratory assignments
: Developing the ability to work within a group is certainly one of the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate. During the laboratory sessions you must follow all proper procedures to avoid injuring yourself or anyone else that works with you.Textbook
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Microsystem Design 4th printing, 2002 Kluwer Academic Publishers ISBN 0-7923-7246-8
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Schedule and Syllabus
| Week | Lecture Topics | Reading Assignment | Laboratory Assignment |
| 1 |
Introduction to Microsystems Sharpe, Andreou |
Chapter 1 | |
| 2 | Materials - Atoms, crystals and all that- Hemker |
Chapter 8 | |
| 3 | Processing I: Microfabrication, oxidation, lithography Hemker |
Chapter 3 | |
| 4 | Processing II: Film deposition, etching, doping Hemker, Andreou |
Chapter 4 | |
| 5 | Mechanics Sharpe |
Chapter 8,9, 10 | |
| 6 | Midterm Examination Case Study I: Pressure sensor Andreou |
Chapter 18 | |
| 7 | Fluids and fluidic devices Sharpe and colleagues |
Chapter 13 | Lab 1 |
| 8 | Electronics I: Charge carriers, transport, sheet
resistance, MOS transistors, noise Andreou Handout 8a, Handout 8b, Handout 8c, Handout 8d, Handout 8e, Handout 8f, Handout 8g |
Chapters 14, 16 | |
| 9 | Electronics II: Electrostatics, fields,
capacitors, pn junctions Andreou |
Lab 2
Due: April 28th 5.00 p.m. ECE Office Barton Hall |
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| 10 | Modeling and simulation Andreou |
Chapter 5 | |
| 11 | Case Study II: PCR Amplification and Biosensor Microsystems Hemker, Wang |
Chapter 22 | |
| 12 | Case Study III: Accelerometer
Sharpe |
Chapter 19 | Lab 3 |
| 13 | Andreou Advanced Topics (energetics, scaling laws) |
Homework Assignments and Solutions
| Homework #1: Due February 6th | Solutions to Homework #1 |
| Homework # 2: Due February 19th, 5 p.m. (Prof. Hemker's office door) | Solutions to Homework #2 |
| Homework # 3: Due February 24th, 5 p.m. (Prof. Hemker's office door) | Solutions to Homework #3 |
| Homework # 4: Due March 3rd, 5 p.m. (Prof. Sharpe's office Latrobe 126) | Solutions to Homework #4 |
| Midterm Examination (Thursday March 6th) | Solutions to Midterm |
| Homework # 5: Due March 28th | Solutions to Homework #5 |
| Homework # 6: Due April 3rd | Solutions to Homework #6 |
| Homework #7: Due April 24th | Solutions to Homework #7 |
| Due May 9th, 5 p.m., Barton Hall ECE Department Office. |
Reading References
1. Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, 4th printing 2002.
2. MEMS and Microsystems: Design and Manufacture, Tai-Ran Hsu, McGraw-Hill, 2002.
MEMS Resources
MEMS manufacturers and products
CAD Tools
Berkeley SUGAR simulation environment for Windows and Linux; requires MATLAB version 6.x. Download latest version from SourceForge.
MEMS Pro physical layout, extraction, visualization and simulation tools from MEMSCAP.
DOLPHIN SMASH: Multi-domain simulator, a version of SPICE with support for VHDL, VHDL-AMS and other simulation extensions - free download-.
HAMSTER site: VHDL-AMS simulation environment -free download-.
Analog and Mixed Signal Extensions to VHDL (VHDL-AMS)
Hamburg VHDL (VHSIC (Very High Speed Integrated Circuits) Hardware Design Language) archive
Frequently Asked Questions
How do I ... ? FAQ (New!)
Related Courses
520/580.495 Microfabrication Laboratory
520.773 Advanced Topics in Fabrication and Microengineering
MEMS Links